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dc.contributor.author김용태-
dc.contributor.author민석기-
dc.contributor.author홍종성-
dc.contributor.author김충기-
dc.date.accessioned2024-01-22T00:35:16Z-
dc.date.available2024-01-22T00:35:16Z-
dc.date.created2022-01-10-
dc.date.issued1990-01-
dc.identifier.issn0374-4884-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/147192-
dc.publisherKorean Physical Society-
dc.titleCharacteristics of plasma enhanced chemical vapor deposition tungsten thin films.-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationJournal of the Korean Physical Society, v.23, pp.511 - 517-
dc.citation.titleJournal of the Korean Physical Society-
dc.citation.volume23-
dc.citation.startPage511-
dc.citation.endPage517-
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