KIST Library Institutional Repository

실리콘 Thermopile 집적센서의 기술동향

Authors

주병권; 김형곤; 오명환

Issue Date

1989-12

Publisher

대한전자공학회

Citation

전자공학회지, v.16, no.6, pp.546 - 555

Keywords

MEMS; micromachining; microsensor; thermopile sensor; sensor

ISSN

1016-9288

URI

https://pubs.kist.re.kr/handle/201004/147293

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML