Properties of co-deposited indium tin oxide and zinc oxide films using a bipolar pulse power supply and a dual magnetron sputter source

Title
Properties of co-deposited indium tin oxide and zinc oxide films using a bipolar pulse power supply and a dual magnetron sputter source
Authors
황만수정희섭김원목서용운
Keywords
ITO; ZnO; co-sputtering; bipolar pulse power supply
Issue Date
2003-07
Publisher
Journal of Vacuum Science & Technology A
Citation
v. 21, no. 4, 1399-1403
URI
http://pubs.kist.re.kr/handle/201004/14754
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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