입자집적화 기술의 연구현황 및 전망

Title
입자집적화 기술의 연구현황 및 전망
Authors
김덕호
Keywords
입자집적화; 가스증착; 자기조직화; 마이크로매니퓰레이션; 나노매니퓰레이션
Issue Date
2003-07
Publisher
KOSEN Expert Review
Citation
, 1-19
URI
http://pubs.kist.re.kr/handle/201004/14759
Appears in Collections:
KIST Publication > ETC
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