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dc.contributor.author김희중-
dc.contributor.author한석희-
dc.contributor.author이택동-
dc.contributor.author강일구-
dc.date.accessioned2024-01-22T01:39:38Z-
dc.date.available2024-01-22T01:39:38Z-
dc.date.created2022-01-10-
dc.date.issued1986-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/147821-
dc.titleInfluence of sputtering condition on the thin film characteristics in Co-base alloys-
dc.title.alternative스파터링조건이 코발트계 합금의 박막특성에 미치는 영향-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation대한금속학회지, v.24, no.12, pp.1316 - 1322-
dc.citation.title대한금속학회지-
dc.citation.volume24-
dc.citation.number12-
dc.citation.startPage1316-
dc.citation.endPage1322-
dc.subject.keywordAuthorsputtering-
dc.subject.keywordAuthorCo alloy-
dc.subject.keywordAuthorthin film-
dc.subject.keywordAuthor스퍼터링-
dc.subject.keywordAuthor코발트계합금-
dc.subject.keywordAuthor용질농도-
dc.subject.keywordAuthorsolute concentration-
dc.subject.keywordAuthor스퍼터율-
dc.subject.keywordAuthorsputter yield-
dc.subject.keywordAuthor증착속도-
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