3-Dinensional antenna coupled uncooled type thermal infrared detector

Title
3-Dinensional antenna coupled uncooled type thermal infrared detector
Authors
문성욱
Keywords
3D MEMS antenna; infrared detector; microbolometer
Issue Date
2003-09
Publisher
The 3rd International Symposium on Quantum-Functional Systems
URI
http://pubs.kist.re.kr/handle/201004/14835
Appears in Collections:
KIST Publication > Conference Paper
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