Optimization of tunneling magnetotransport and thermal properties in magnetic tunnel junctions by rapid thermal anneal

Title
Optimization of tunneling magnetotransport and thermal properties in magnetic tunnel junctions by rapid thermal anneal
Authors
이경일채경훈이제형하재근이긍원이우영신경호
Keywords
tunneling magnetoresistance; magnetic tunnel junctions (MTJs); magnetic random access memory (MRAM); rapid thermal anneal (RTA)
Issue Date
2003-09
Publisher
Microelectronic engineering
Citation
VOL 69, NO 2-4, 305-308
URI
http://pubs.kist.re.kr/handle/201004/14840
ISSN
0167-9317
Appears in Collections:
KIST Publication > Article
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