3D MEMS antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique

Title
3D MEMS antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique
Authors
박종연김근태문성욱박정호
Keywords
MEMS; plastic micro machining; mesh structure bonding
Issue Date
2003-08
Publisher
2003 IEEE/LEOS International Conference on Optical MEMs
URI
http://pubs.kist.re.kr/handle/201004/14870
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE