Growth of SiC nanorod using single precursor

Title
Growth of SiC nanorod using single precursor
Authors
노대호김재수변동진양재웅김나리
Keywords
SiC nanorod; HMDS; CVD; Ni
Issue Date
2003-09
Publisher
대한금속ㆍ재료학회지; J. Kor. Inst. Met. & Mater.
Citation
VOL 41, NO 9, 600-605
URI
http://pubs.kist.re.kr/handle/201004/14873
Appears in Collections:
KIST Publication > Article
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