A study on the target erosion and film deposition in a magnetron sputtering system

Title
A study on the target erosion and film deposition in a magnetron sputtering system
Authors
최선희Yeong-Ho ParkUi-Hui KwonWon-Jong Lee
Keywords
target erosion
Issue Date
2003-09
Publisher
The 4th Asian-European International Conference on Plasma Surface Engineering
Citation
, 106-106
URI
http://pubs.kist.re.kr/handle/201004/14883
Appears in Collections:
KIST Publication > Conference Paper
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