KIST Library Institutional Repository

プラズマパスの발생とそれを용いた반도체표면반응の제어

Other Titles

Creation of high-peak plasma-pulses and control of surface reaction in short-pulsed chemical beam epitaxy.

Authors

Park Young Ju; K. Ozasa; Y. Aoyagi

Issue Date

1995-02

Keywords

SP-CBE

URI

https://pubs.kist.re.kr/handle/201004/148847

Appears in Collections:

KIST Publication > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML