Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | D. J. Kim | - |
| dc.contributor.author | C. S. Kwon | - |
| dc.contributor.author | I. H. Choi | - |
| dc.contributor.author | Min Suk-Ki | - |
| dc.date.accessioned | 2024-02-21T05:10:46Z | - |
| dc.date.available | 2024-02-21T05:10:46Z | - |
| dc.date.issued | 1994-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/148929 | - |
| dc.title | Nitrogen implanted tungsten thin films for Cu diffusion barrier. | - |
| dc.title.alternative | Nitrogen implanted tungsten thin films for Cu diffusion barrier. | - |
| dc.type | Book | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.relation.isPartOfSeries | 한국물리학회 제 69 회 학술논문 발표회 | - |
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