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Effects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films.

Other Titles

Effects of nitrogen on the stress of plasma deposited tungsten and tungsten nitride thin films.

Authors

Kim Yong Tae; S. J. Lee; C. S. Kwon; Y. W. Park; C. C. Lee; C. W. Lee; Min Suk-Ki

Issue Date

1993-01

URI

https://pubs.kist.re.kr/handle/201004/148972

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KIST Publication > Others

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