DSpace at KIST: 입자집적화 기술의 연구현황 및 전망

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DSpace at KISTKIST Publication 2003

입자집적화 기술의 연구현황 및 전망

Authors: KIM DEOK HO

Issue Date: 2003-07

Keywords: 입자집적화; 가스증착; 자기조직화; 마이크로매니퓰레이션; 나노매니퓰레이션

URI: https://pubs.kist.re.kr/handle/201004/149086

Appears in Collections:: KIST Publication > 2003

Files in This Item:: 126751325579252760_01.pdf(3.25 MB)Download

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