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Characteristics of ZnO thin film deposited on various metal bottom electrodes

Title
Characteristics of ZnO thin film deposited on various metal bottom electrodes
Authors
Young-Ah Jeon; Kwang-Soo No; Jong-Sung Kim; 윤영수
Keywords
ZnO thin film; various metal bottom electrodes; radio-frequency (rf) sputtering
Issue Date
2003-08
Publisher
Metals and Materials International
Citation
VOL 9, NO 4, 383-387
URI
http://pubs.kist.re.kr/handle/201004/14928
ISSN
15989623
Appears in Collections:
KIST Publication > Article
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