VOA fabrication with symmetric actuator

Title
VOA fabrication with symmetric actuator
Authors
김태엽허재성문성욱신현준이상렬
Keywords
구동기; 광감쇄기; SOI; DRIE
Issue Date
2003-07
Publisher
2003 년도 대한전기학회 하계학술대회 논문집
Citation
, 1912-1913
URI
http://pubs.kist.re.kr/handle/201004/14957
Appears in Collections:
KIST Publication > Conference Paper
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