A study on the effect of catalysts to SIC nanowire growth by APCVD using hexamethyldisilane.

Title
A study on the effect of catalysts to SIC nanowire growth by APCVD using hexamethyldisilane.
Authors
양재웅노대호변동진김재수
Keywords
SiC
Issue Date
2003-07
Publisher
Proceeding of KOCS International Symposium 2003
Citation
, 158-161.
URI
http://pubs.kist.re.kr/handle/201004/14968
Appears in Collections:
KIST Publication > Conference Paper
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