정전용량형 미세가공 초음파 트랜스듀서 및 그 제조방법

Author
이병철김태송박진수강동현
Assignee
한국과학기술연구원
Regitration Date
2024-04-02
Registration No.
11944998
Application Date
2020-03-18
Application No.
16/822018
Country
US
URI
https://pubs.kist.re.kr/handle/201004/149714
Appears in Collections:
KIST Patent > 2020
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