Hydrogen degradation of Pt/SBT/Si, Pt/SBT/Pt ferroelectric gate structures and degradation resistance of Ir gate electrode

Title
Hydrogen degradation of Pt/SBT/Si, Pt/SBT/Pt ferroelectric gate structures and degradation resistance of Ir gate electrode
Authors
박전웅김익수김성일김용태성만영
Keywords
hydrogen annealing; Bi-layered perovskite; interface trap
Issue Date
2003-06
Publisher
마이크로전자 및 패키징학회지; Journal of Microelectronics and Packaging Society
Citation
VOL 10, NO 2, 49-54
URI
http://pubs.kist.re.kr/handle/201004/14998
ISSN
1226-9360
Appears in Collections:
KIST Publication > Article
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