Growth of SiC nanorods using Fe and hexamethyldisilabutane

Title
Growth of SiC nanorods using Fe and hexamethyldisilabutane
Authors
노대호김재수변동진양재웅김나리
Keywords
SiC; nanorod; VLS; HMDS; CVD; Fe
Issue Date
2003-06
Publisher
한국표면공학회지; J. Kor. Inst. Surf. Eng.
Citation
VOL 36, NO 3, 234-241
URI
http://pubs.kist.re.kr/handle/201004/15021
Appears in Collections:
KIST Publication > Article
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