Experimental study on wet thermal oxides for SOI fabrication

Title
Experimental study on wet thermal oxides for SOI fabrication
Authors
변영태김형권
Keywords
실리콘 절연체; 스마트 절단; 산화
Issue Date
2003-05
Publisher
새물리
Citation
v. 46, no. 5, 297-303
URI
http://pubs.kist.re.kr/handle/201004/15061
Appears in Collections:
KIST Publication > Article
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