V₂O5/V/V₂O5 based uncooled infrared detector by MEMS technology

Title
V₂O5/V/V₂O5 based uncooled infrared detector by MEMS technology
Authors
한용희허재성최인훈김근태신현준치엔문성욱
Keywords
볼로미터; MEMS; 비냉각; 바나듐 옥사이드
Issue Date
2003-05
Publisher
2003 한국재료학회 춘계학술대회
URI
http://pubs.kist.re.kr/handle/201004/15067
Appears in Collections:
KIST Publication > Conference Paper
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