Nanostructured silicon formations as a result of ionized N₂ gas reactions on silicon with native oxide layers

Title
Nanostructured silicon formations as a result of ionized N₂ gas reactions on silicon with native oxide layers
Authors
정민철이태경박용주전성호이주상한문섭정종석이정용
Keywords
nanocrystalline Si
Issue Date
2003-05
Publisher
Applied Physics Letters
Citation
v. 82, no. 21, 3653-3655.
URI
http://pubs.kist.re.kr/handle/201004/15089
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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