A study on the low temperature growth of SiC film with a 1,3-DSB precursor

Title
A study on the low temperature growth of SiC film with a 1,3-DSB precursor
Authors
양재웅노대호윤진국김재수
Keywords
SiC; CVD; precursor
Issue Date
2003-05
Publisher
한국표면공학회지; J. Kor. Inst. Surf. Eng.
Citation
VOL 36, NO 2, 141-147
URI
http://pubs.kist.re.kr/handle/201004/15137
Appears in Collections:
KIST Publication > Article
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