Fabrication of flexible FBAR using thin silicon wafer.

Title
Fabrication of flexible FBAR using thin silicon wafer.
Authors
김용국배용환강유리김재경김수원주병권
Keywords
FBAR; thin wafer; MEMS; piezoelectric effect
Issue Date
2003-05
Publisher
한국 MEMS 학술대회
Citation
, 380-383
URI
http://pubs.kist.re.kr/handle/201004/15140
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE