Characteristics of MIS capacitors using Ta2O5 films deposited on ZnO/p-Si

Title
Characteristics of MIS capacitors using Ta2O5 films deposited on ZnO/p-Si
Authors
노영수S. CharrerjeeS. NandiS.K. SamantaC.K. MaitiS. Maikap최원국
Keywords
MIS capacitor
Issue Date
2003-04
Publisher
Microelectronic Engineering
Citation
v. 66, 637-642
URI
http://pubs.kist.re.kr/handle/201004/15163
ISSN
0167-9317
Appears in Collections:
KIST Publication > Article
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