A thin film condition of material for AR and HR coating by the DC/RF magnetron sputter

Title
A thin film condition of material for AR and HR coating by the DC/RF magnetron sputter
Authors
양진석조운조이천김동우신춘교
Keywords
AR and HR coating; refractive index; growth rate; RF power; the ratio of Gas(Ar:O2)
Issue Date
2003-04
Publisher
2003년도 한국전기전자재료학회 춘계학술대회논문집; Proceeding of 2003 Spring Symposium of KIEE
Citation
, 206-209
URI
http://pubs.kist.re.kr/handle/201004/15169
Appears in Collections:
KIST Publication > Conference Paper
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