Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.

Title
Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.
Authors
강성철이시형박종완이전국
Keywords
Tungsten
Issue Date
2003-03
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
v. 40, no. 3, 268-272.
URI
http://pubs.kist.re.kr/handle/201004/15236
Appears in Collections:
KIST Publication > Article
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