Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.
- Title
- Microstructure control of tungsten film for bragg reflectors of thin film bulk acoustic wave resonators.
- Keywords
- Tungsten
- Issue Date
- 2003-03
- Publisher
- 한국세라믹학회지; Journal of the Korean Ceramic Society
- Citation
- v. 40, no. 3, 268-272.
- Appears in Collections:
- KIST Publication > Article
- Files in This Item:
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