The growth and characteristics of wet thermal oxidation film for SOI fabrication

Title
The growth and characteristics of wet thermal oxidation film for SOI fabrication
Authors
김형권변영태김선호한상국옥성해
Keywords
SOI; 열산화막 성장; 습식 열산화로; 식각 마스크; 포토리소그라피
Issue Date
2003-02
Publisher
한국광학회 제 14 회 정기총회 및 2003 년도 동계학술발표회
Citation
, 172-173
URI
http://pubs.kist.re.kr/handle/201004/15243
Appears in Collections:
KIST Publication > Conference Paper
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