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dc.contributor.author김형권-
dc.contributor.author변영태-
dc.contributor.author김선호-
dc.contributor.author한상국-
dc.contributor.author옥성해-
dc.date.accessioned2015-12-02T05:16:25Z-
dc.date.available2015-12-02T05:16:25Z-
dc.date.issued200302-
dc.identifier.citation, 172-173-
dc.identifier.other17367-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/15243-
dc.publisher한국광학회 제 14 회 정기총회 및 2003 년도 동계학술발표회-
dc.subjectSOI-
dc.subject열산화막 성장-
dc.subject습식 열산화로-
dc.subject식각 마스크-
dc.subject포토리소그라피-
dc.titleThe growth and characteristics of wet thermal oxidation film for SOI fabrication-
dc.typeConference Paper-
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