Effects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics

Title
Effects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics
Authors
임건자김태은이종호김주선이해원현상훈
Keywords
CeO₂; chemical mechanical planarization; synthetic temperature; suspension stability; pH
Issue Date
2003-02
Publisher
Journal of the Korean Ceramic Society
Citation
VOL 40, NO 2, 167-171
URI
http://pubs.kist.re.kr/handle/201004/15264
Appears in Collections:
KIST Publication > Article
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