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dc.contributor.author문성욱-
dc.date.accessioned2015-12-02T05:16:30Z-
dc.date.available2015-12-02T05:16:30Z-
dc.date.issued200302-
dc.identifier.citationVOL 2, 50-62-
dc.identifier.issn1227-741X-
dc.identifier.other17278-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/15280-
dc.publisher월간 반도체-
dc.subject마이크로-
dc.subject나노기술-
dc.title독일 및 프랑스의 마이크로/나노 기술 동향-
dc.typeOther-
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