Application of nano-cluster ion beam to surface smoothening, etching, and ultra-shallow junction formation.

Title
Application of nano-cluster ion beam to surface smoothening, etching, and ultra-shallow junction formation.
Authors
송재훈최원국
Keywords
Gas cluster
Issue Date
2003-02
Publisher
Journal of the Korean Physical Society
Citation
v. 42, S235-S239.
URI
http://pubs.kist.re.kr/handle/201004/15298
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE