Preparation of Cu films on polymer substrate by ECR-MOCVD coupled with DC bias at room temperature

Title
Preparation of Cu films on polymer substrate by ECR-MOCVD coupled with DC bias at room temperature
Authors
이중기조병원
Keywords
Cu film; ECR-MOCVD; DC bias; room temperature
Issue Date
2003-10
Publisher
The Electrochemical Society Proceedings
Citation
, 82-92
URI
http://pubs.kist.re.kr/handle/201004/15333
Appears in Collections:
KIST Publication > Conference Paper
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