Characteristics of LiCoO₂ thin film deposited by RF magnetron sputtering method with substrate bias

Title
Characteristics of LiCoO₂ thin film deposited by RF magnetron sputtering method with substrate bias
Authors
이영재김광범박호영오시형조병원조원일
Keywords
thin film cathode
Issue Date
2003-10
Publisher
Proceeding of the 204th Meeting of the Electrochemical Society
URI
http://pubs.kist.re.kr/handle/201004/15354
Appears in Collections:
KIST Publication > Conference Paper
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