Coordination polyhedron and chemical vapor deposition of Cu(hfacac)₂(t-BuNH₂)

Title
Coordination polyhedron and chemical vapor deposition of Cu(hfacac)₂(t-BuNH₂)
Authors
우경자백호정이완인
Keywords
coordination polyhedron; Cu precursor; MOCVD; deposition rate
Issue Date
2003-10
Publisher
Inorganic Chemistry
Citation
VOL 42, NO 20, 6484-6488
URI
http://pubs.kist.re.kr/handle/201004/15359
ISSN
0020-1669
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE