Nanotribological behavior of adsorbed water layer on silicon surface

Title
Nanotribological behavior of adsorbed water layer on silicon surface
Authors
김두인안효석최동훈
Keywords
microsystem; humidity; adsorption layer; capillary force; shear stress
Issue Date
2003-10
Publisher
한국윤활학회지; Journal of the KSTLE
Citation
VOL 19*, NO 5, 245-250
URI
http://pubs.kist.re.kr/handle/201004/15384
ISSN
1229-4845
Appears in Collections:
KIST Publication > Article
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