Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process

Title
Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process
Authors
김태은임건자이종호김주선이해원임대순
Keywords
chemical mechanical planarization
Issue Date
2003-01
Publisher
한국세라믹학회지 (Journal of the Korean Ceramic Society)
Citation
VOL 40, NO 1, 77-80
URI
http://pubs.kist.re.kr/handle/201004/15399
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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