Growth of highly c-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonators.

Title
Growth of highly c-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonators.
Authors
이시형이전국윤기현
Keywords
AlN
Issue Date
2003-01
Publisher
Journal of Vacuum Science & Technology A:
Citation
v. 21, no. 1, 1-5.
URI
http://pubs.kist.re.kr/handle/201004/15407
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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