Mechanical analysis for crack-free release of chemical-vapor-deposited diamond wafers

Title
Mechanical analysis for crack-free release of chemical-vapor-deposited diamond wafers
Authors
정증현이소윤이욱성백영준권동일
Keywords
freestanding diamond films; cracking; residual stress; interfacial adhesion
Issue Date
2002-08
Publisher
Diamond and Related Materials
Citation
VOL 11, NO 8, 1597-1605
URI
http://pubs.kist.re.kr/handle/201004/15475
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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