Localized bond states and quantum size effect in SiNχ p-Si(100) thin films deposited by rf-reactive sputtering method

Title
Localized bond states and quantum size effect in SiNχ p-Si(100) thin films deposited by rf-reactive sputtering method
Authors
Tae-Gyoung Lee박용주Eun-Kyu Kim
Issue Date
2002-08
Publisher
The 11th Seoul International Symposium on the physics of Semiconductors and Applications-2002
Citation
, 319-319
URI
http://pubs.kist.re.kr/handle/201004/15487
Appears in Collections:
KIST Publication > Conference Paper
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