Crystal structure and electrical properties Pt/SrBi2Nb2O9/ZrO2/Si ferroelectric gate structure

Title
Crystal structure and electrical properties Pt/SrBi2Nb2O9/ZrO2/Si ferroelectric gate structure
Authors
최훈상임건식이종한김용태김성일최인훈
Keywords
결정구조; SBN/ZrO2 강유전체게이트 구조; 전기적특성; interdiffusion
Issue Date
2002-08
Publisher
11th Seoul International Symposium on Physics of Semiconductors and Applications 2002 (ISPSA 2002)
Citation
, 331-332
URI
http://pubs.kist.re.kr/handle/201004/15500
Appears in Collections:
KIST Publication > Conference Paper
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