Formation of MoSi₂-Si₃N₄ coatings on Mo substrate by CVD

Title
Formation of MoSi₂-Si₃N₄ coatings on Mo substrate by CVD
Authors
윤진국변지영김긍호김재수
Issue Date
2002-08
Publisher
Golden Research Conference; High Temperature Materials, Processes, and Diagnostics
Citation
, 1071-1076
URI
http://pubs.kist.re.kr/handle/201004/15513
Appears in Collections:
KIST Publication > Conference Paper
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