H₂/N₂ mixing plasma pretreatment of sapphire for GaN deposition

Title
H₂/N₂ mixing plasma pretreatment of sapphire for GaN deposition
Authors
J.K.Kim박용주D.ByunE.K.Koh
Issue Date
2002-08
Publisher
The 11th Seoul International Symposium on the Physics of Semiconductors and Applications-2002
Citation
, 62-62
URI
http://pubs.kist.re.kr/handle/201004/15515
Appears in Collections:
KIST Publication > Conference Paper
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