Influence of the process parameters on the surface resistance of Cu/C films on polymer substrates prepared at ambient temperature by ECR-chemical vapor deposition.

Title
Influence of the process parameters on the surface resistance of Cu/C films on polymer substrates prepared at ambient temperature by ECR-chemical vapor deposition.
Authors
이중기전법주고형덕변동진박달근
Keywords
ECR-MOCVD
Issue Date
2002-08
Publisher
17th International Symposium on Chemical Reaction Engineering
Citation
, MS# 0150-MS# 0150
URI
http://pubs.kist.re.kr/handle/201004/15518
Appears in Collections:
KIST Publication > Conference Paper
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