Evaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers.

Title
Evaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers.
Authors
박현미김영만이강봉
Keywords
silicon wafers; Contaminants
Issue Date
2002-07
Publisher
Interact 2002
Citation
, 252-252
URI
http://pubs.kist.re.kr/handle/201004/15545
Appears in Collections:
KIST Publication > Conference Paper
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