Characterization of 5-inch free-standing diamond wafers deposited by single-cathode DCPACVD.

Title
Characterization of 5-inch free-standing diamond wafers deposited by single-cathode DCPACVD.
Authors
백영준채기웅이욱성
Issue Date
2002-07
Publisher
Proc. the 8th International Conference New Diamond Science and Technology 2002
URI
http://pubs.kist.re.kr/handle/201004/15582
Appears in Collections:
KIST Publication > Conference Paper
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