Diamond thick film deposition in wafer scale using single-cathode direct current (DC) plasma assistedschemical vapour deposition(PACVD).

Title
Diamond thick film deposition in wafer scale using single-cathode direct current (DC) plasma assistedschemical vapour deposition(PACVD).
Authors
백영준채기웅이욱성
Issue Date
2002-07
Publisher
The 6th APCPST, 15th SPSM, and 11th KAPRA
URI
http://pubs.kist.re.kr/handle/201004/15583
Appears in Collections:
KIST Publication > Conference Paper
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