The large area deposition of diamond by the multi-cathode direct current plasma assisted chemical vapor deposition (DC PACVD) method

Title
The large area deposition of diamond by the multi-cathode direct current plasma assisted chemical vapor deposition (DC PACVD) method
Authors
이재갑은광용백영준전희준류제원신택중박종완
Keywords
diamond growth and characterization
Issue Date
2002-06
Publisher
Diamond and Related Materials
Citation
VOL 11, 463-466
URI
http://pubs.kist.re.kr/handle/201004/15600
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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