Growth kinetics of three Mo-silicide layers formed by chemical vapor deposition of Si on Mo substrate

Title
Growth kinetics of three Mo-silicide layers formed by chemical vapor deposition of Si on Mo substrate
Authors
윤진국변지영김긍호김재수최종술
Keywords
growth kinetics
Issue Date
2002-06
Publisher
Surface and Coatings Technology
Citation
VOL 155, NO 1, 85-95
URI
http://pubs.kist.re.kr/handle/201004/15625
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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